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Abstract

We presents DC and RF performance of 30 nm gate lengthAlN spacer basedInAlN/GaN based MOSHEMT with In GaN back barrier is investigated using Silvaco ATLAS TCAD tool. The proposed MOSHEMT featuring Al2O3 oxide layer, heavily doped n+ GaN Source/ drain region exhibits thesheet carrier density (ns) of 1.66X1013 Cm-2 , drain current density of 1.8 A/mm. drain current density, transconductance (gm)of 530 mS/mm, low leakage current 10-9 A/mm and current gain cut-off frequency (ft) of .The excellent electrical characteristics of proposed MOSHEMTsareattractive candidates for future high power sub millimetre wave applications.

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